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Wednesday, June 25, 2014

#MEMS: Worlds Smallest Accleronmeter Priced for Any Budget'

The world's smallest inertial sensors have already taken China by storm and are poised to take on the rest of us with their software iGyrpo which is affordable by any smartphone or tablet maker: R. Colin Johnson @NextGenLog


mCube says it has the world's smallest three-axis MEMS accelerometer and the only monolithic single-chip version with integrated MEMS and ASIC on the same die. The device is shown here in a 3x3 mm package but is also available in a 2x2 mm package.


The ASIC is first grown on the bottom, then the MEMS mechanical elements are fabricated above and connected with tiny 3 micron vias after which the MEMS element is hermetically sealed with a silicon cap.

Further Reading